Extreme ultraviolet (EUV) lithography finally is moving into production, but foundry customers now must decide whether to implement their designs using EUV-based single patterning at 7nm, or whether ...
Self-aligned lithographic process techniques are playing an increasingly important role in advanced technology nodes. Even with the growing use of extreme ultraviolet (EUV) lithography, ...
If designers can stand all the rules that come with quadruple patterning, the road is clear to 10nm and maybe beyond. Every February, experts in nano patterning technologies converge in San Jose, ...
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